Etching of the Aluminum Foil Surface Using High-Frequency Plasma to Produce a Nanoporous Aluminum Oxide Membrane

G. S. Amirbekova, Balaussa Ye. Alpysbayeva, Erasyl Erlanuly, Vladimir Smirnov

2021

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DOI 10.1109/elconrus51938.2021.9396575
Data confidence 70 medium
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Abstract

This work is related to the treatment of the surface of aluminum foil with plasma in a high-frequency discharge and the formation of a nanoporous aluminum oxide membrane based on it using an electrochemical anodizing process. It was known that after plasma etching, tracks were formed on the surface of aluminum foil. It is established that these changes will depend on the power of the high-frequency discharge. The surface of aluminum foil treated with plasma and nanoporous aluminum oxide membranes formed after electrochemical anodizing were studied using scanning electron microscopy.