Characteristics of ion-plasma coatings AlN-TiB2(TiSi2) after annealing

2014

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DOI 10.1109/crmico.2014.6959623
Data confidence 70 medium
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Abstract

The magnetron sputtered coatings on base of AlN-TiB2(TiSi2) are investigated in this paper. The element composition, structural-phase composition, morphology are investigated after annealing of coatings with 900°C and 1300°C. The amorphous structure and high damping properties of the AlN-TiB2(TiSi2) coating make promising the use of these coatings as diffusion barriers in the form of independent elements.