Аннотация
The magnetron sputtered coatings on base of AlN-TiB2(TiSi2) are investigated in this paper. The element composition, structural-phase composition, morphology are investigated after annealing of coatings with 900°C and 1300°C. The amorphous structure and high damping properties of the AlN-TiB2(TiSi2) coating make promising the use of these coatings as diffusion barriers in the form of independent elements.