Copper-Containing Compositions Based on Alicyclic Polyimide for Microelectronics

2017

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DOI 10.24151/1561-5405-2017-22-6-509-517
Data confidence 70 medium
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Abstract

Медьсодержащие композиции на основе алициклического полиимида для микроэлектроники В.Д.Кравцова 1 , М.Б.Умерзакова 1 , Н.Е.Коробова 2 , Д.В.Вертянов 2 1 АО «Институт химических наук им.А.Б.Бектурова», г.Алматы, Республика Казахстан 2 Национальный исследовательский университет «МИЭТ», г.Москва,