Electron-beam-induced modification of stoichiometry and acceleration of titanium diffusion in Al2O3/Al/C structures

Alexander D. Pogrebnjak, Б. П. Гриценко, Sergei M. Duvanov, N.A Pogrebnjak, М. К. Кылышканов, V. V. Ponaryadov

2006

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DOI 10.1134/s1063785006120194
Data confidence 85 high
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Abstract

The electron-beam-induced modification of stoichiometry and acceleration of titanium diffusion in Al 2 O 3 /Al/C structures have been studied for the first time using He 4+ ion backscattering, scanning electron microscopy, and electron probe microanalysis techniques. It is established that the electron beam treatment leads to an increase in the effective diffusion coefficient of ion-implanted titanium, changes the ratio of aluminum and oxygen concentrations in the α-Al 2 O 3 layer, and induces the substitution of carbon for oxygen in this layer.