Abstract
The interest in the surface structures with their special properties has increased considerably due to extensive applications in microand optoelectronics. It is known that the properties of films of submicron size can be different from those of structures having macroscopic dimensions. The parameters that change the properties of films, are the thickness, number of layers, uniformity of the films, the size of clusters and nanocrystals. The presence of small particles and nano-sized elements leads to changes in material properties such as electrical conductivity, refractive index, band gap, magnetic properties, strength, and others (Suzdalev, 2006; Kobayashi, 2005).