Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)

Berik Uzakbaiuly, Aliya Orazalinovna Mukanova, Indira Kurmanbayeva, Zhumabay Bakenov

Eurasian journal of physics and functional materials, 2019

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DOI 10.29317/ejpfm.2019030209

Data confidence 85 high

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Abstract

Thin film of lithium phosphorus oxynitride (LIPON) was successfully deposited by radio frequency (RF) magnetron sputtering technique using a Li 3 PO 4 target. The optimal deposition parameters were determined for the thin films with the highest target-substrate distance. Characterization of deposited film was carried out by AFM, FTIR and Raman spectroscopy, which showed incorporation of nitrogen into the film as both doubly, N d , and possibly triply, N t , coordinated form. The ac impedance spectroscopy measurements revealed that the highest ionic conductivity of 1.1 µScm -1 was achieved at room temperature for the samples prepared at the optimum RF power and gas flow conditions.