Abstract
Research in the field of nanotechnology requires high accuracy and reliability of the obtained results, i.e., an appropriate metrological support of instruments and equipment is needed, which is used in the measurement of linear dimensions, movements, speeds and accelerations of nano-objects. These high-precision systems and instruments need special methods and means of verification/calibration. For measuring linear displacements in the nano-range, non-destructive optical methods of laser interferometry and phasemetery are most promising, providing high sensitivity ~ 10-9 m to the object displacement, high locality, absolute calibration character of measurements in portions of the laser wavelength, and the ability to automate the obtaining and processing of measuring information. In this work, a study of actuator characteristics depending on the applied voltage is considered. The developed 'interferometerphase meter' measuring system allows online investigating of complex piezoceramic structures used in various devices as actuators and the study of object characteristics under the different influences: pulsed and harmonic forms of applied voltage.