InGaAsP-InP ridge-waveguide DBR lasers with first-order surface gratings fabricated using CAIBE

Robert M. Lammert, A.M. Jones, Chris Youtsey, J.S. Hughes, S.D. Roh, I. Adesida, J. J. Coleman

2002

Closed access Metadata (CSL-JSON)
DOI 10.1109/leos.1997.630624
Data confidence 70 medium
How this score is calculated

It is built from checkable properties of the record itself: whether the article has a DOI, how many independent sources confirmed its data, whether the required fields are filled in, and how recent the latest confirmation is. Disagreement between sources and a missing identifier lower it. A value of 80 or above means the record was published without further checking; 60 to 79 means it is published at reduced confidence, with a manual check advisable. A record verified by an editor by hand is never pushed below 90 by a recalculation. This scores our data about the article, not the article itself.

Abstract

Generally, the fabrication of distributed Bragg reflector (DBR) and distributed feedback (DFB) lasers requires regrowth over a grating. While fabricating these devices, special measures must be taken in order to preserve the grating during the regrowth. Moreover, surface preparation techniques are needed to remove grating fabrication contamination before regrowth. Utilizing surface gratings to fabricate DBR lasers solves the problem of regrowth. In this work, we employ chemically assisted ion beam etching (CAIBE) to form first-order DBR gratings into a 0.74 /spl mu/m thick upper cladding structure for an InGaAsP-InP ridge-waveguide (RW) DBR QW laser with a first-order grating.