Low-Period Multilayer Ti/NixMoy Films with Variable Quasi-Homogeneous Structure for Neutron Reflectometry

Mikhail V. Avdeev, Igor V. Gapon, D. G. Merkel, Meir Yerdauletov, D. M. Djanseitov, Т. В. Тропин

2023

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DOI 10.1134/s1027451023040225
Data confidence 70 medium
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Abstract

Abstract The results of testing multilayer Ti/NixMoy heterostructures with a low period of the sublayers are presented regarding the practical applicability of a quasi-homogeneous approach with varying effective scattering length density of thin (thickness <100 nm) films in experiments on specular neutron reflectometry with a changing interface. By changing the effective scattering-length density of the films, it is proposed to vary the contrast between the components of complex interfaces, thus increasing the sensitivity and information content of the in situ neutron experiment. Structures with different ratios of the NixMoy- and Ti-sublayer thicknesses are synthesized by magnetron sputtering. Based on analysis of the neutron specular reflectivity curves, a conclusion is made about the applicability of the homogeneous approximation.