Microdetermination of silicon dioxide on the surface by sensors based on perfluorinated proton-conducting membranes

2012

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DOI 10.1134/s1063784212060199
Data confidence 70 medium
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Abstract

A microdetermination method of silicon dioxide on the silicon surface is studied. In this method, a thin SiO 2 layer is dissolved in an aqueous solution of hydrofluoric acid and then the resulting solution is analyzed with sensors based on perfluorinated proton-conducting membranes. Quantitative determination of silicon dioxide remaining on the silicon surface in a quantity as low as 1 × 10 −6 mol is demonstrated to be feasible.