Functional properties of multilayer vacuum-arc TiN/ZrN coatings

2016

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DOI 10.1088/1757-899x/110/1/012056
Data confidence 70 medium
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Abstract

Nanostructured multilayer Ti/ZrN coatings were synthesized by vacuum-arc deposition with a number of layers 134-533 and an average thickness 20-125nm of layers. A good planarity was revealed resulting in a range of nanometer layer from plasma streams in a reactive environment. Phase-structural changes mechanisms were established as a model of critical operating coatings' conditions of in the surface layers under the action of an aggressive oxygen atmosphere at high temperature (700°C). The thickness parameter effect on its hardness of the multilayer system was shown. It was found that the maximum hardness of 42 GPa and the lowest abrasion of coating 1,3 × 10-5 mm3 × H-1 × mm-and counterbody 1,9 × 10-6 mm3 × H-1 × mm-1 inherent in TiN/ZrN system with the smallest layer thickness of 20 nm in the period. The results are explained by the influence of the size factor interphase boundaries magnified in a multilayer system with a nanometer thick layers.