Control and optimization of technological processes for forming nanoscale films for sensitive sensor elements

2020

Full text Open access: Gold Metadata (CSL-JSON)
DOI 10.1088/1757-899x/971/4/042086
Data confidence 70 medium
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Abstract

Abstract Modern metal film sensors are used in products and systems of rocket, space and aviation equipment, in extreme operating conditions. In order for the sensors to function correctly in such conditions, they must have a high temporary stability over the entire life of operation and storage. In addition, metal film sensors are often operated at elevated temperatures and under the influence of large-scale vibration and shock. Therefore, they must have high mechanical static and dynamic strength. Increased requirements for the reliability, accuracy and strength of metal film sensors force designers and technologists to develop new design and technological solutions that ensure the regular operation of sensors in products and systems of rocket, space and flight equipment.