Structural and Transport Properties of Dust Formation in Plasma of Noble Gases Mixture in Radio Frequency Discharge

2013

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DOI 10.1002/ctpp.201200122
Data confidence 70 medium
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Abstract

Abstract In the present paper properties of dust formation in RF discharges of pure helium and helium‐argon mixture are investigated. Analysis of macroscopic properties of dust formation at different pressures of background gas reveals a change of properties of dust formation in the mixture of gases in comparison with discharge in pure helium. As possible mechanisms for observed behavior, a change of ion jet content and a friction of neutral component are considered. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)