Abstract
The paper presents the results of the study of the effect of ratios of reactive gases N2 and O2 on the structural phase state and the mechanical properties of nitrogen-containing titanium dioxide coatings obtained by reactive magnetron sputtering on the surface of AISI 304 stainless steel. According to the results of the X-ray phase analysis, the coatings contain titanium dioxide in the form of anatase, rutile and a small amount of brookite. It was found that with an increase in the nitrogen content in the working atmosphere, the volume fraction of anatase and rutile increases. An increase in the nitrogen content in the gas atmosphere leads to the formation of a quasihomogeneous surface texture with a less pronounced block structure. Based on the results of nanoindentation, it can be assumed that the formation of a quasihomogeneous texture can cause a decrease in the physicomechanical parameters of the coatings. It was established that the structure, phase composition, and mechanical properties of the coatings depend on the gas ratio N2/O2 in theт negative bias mode (Ubias = −150 V).