Investigation of the structural properties of amorphous films obtained by high-frequency magnetron sputtering

2023

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DOI 10.31643/2023.15
Data confidence 70 medium
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Abstract

This article presents a study of amorphous films obtained using the high-frequency magnetron sputtering (HFMS) method and their potential applications in various industries. Materials play a crucial role in the modern world, and the development of new materials with unique structural and functional properties has become a paramount task in the scientific and engineering community. HFMS is a powerful method for synthesizing amorphous materials with high structural purity and controllable properties. The article commences with a description of the experimental setup and methods for obtaining amorphous films using HFMS, including the operational principles of the equipment, the selection of materials for sputtering, and process parameters. Special attention is given to the magnetron as a key component of the setup. Subsequently, the article explores various fields of application for amorphous films obtained through HFMS, including integrated circuits, sensors, solar cells, medical devices, optical coatings, and more. HFMS provides the capability to create materials with specific characteristics, making it an essential tool for developing novel materials and enhancing existing technologies. The study of amorphous films and their applications in diverse industries constitutes a significant area of scientific research, and this article offers an overview of synthesis methods and potential material applications.