Abstract
The existing directions of modeling corpuscular-optical systems for the analysis of charged particle beams are considered. It is shown that for these classical approaches, significant improvements of characteristics are possible when using the analysis of aberration curves of the dependence of image smearing on the initial opening angle of the charged particle beam. Taking into account the coefficient of linear longitudinal magnification as an additional parameter in calculations also makes it possible to improve the quality of beam focusing. It is shown that when simulating analyzers of charged particle beam by imposing additional conditions, it is possible to significantly expand the functionality of the systems. Additional conditions are imposed for each system individually, based on the specific tasks for which the device is created.