Abstract
The article presents the results of TiN diffusion-barrier layers studies on a silicon substrate, carried out with the use of the copyrighted software package. In this paper, it is proposed to use several methods for studying the structures and combine them in the form of an integrated approach, which allows not only to increase the calculation accuracy but also to solve most of the arisen problems. Based on this approach, an automated software package for X-ray spectral and X-ray structural analysis was developed to study the elemental and phase composition of the objects, including the analysis of ore minerals, which allows not only to obtain a more complete and detailed picture of the studied objects, but also to increase the sensitivity threshold detection of individual elements that are not detected by individual methods of analysis.