Electro-physical properties of porous anodic alumina films for sensitive elements of MEMS

Н. Е. Коробова, Malika Batalova, Balaussa Ye. Alpysbayeva

2021

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DOI 10.1088/1742-6596/1954/1/012021

Data confidence 70 medium

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Abstract

Abstract The results of a comprehensive study of porous alumina film electrical properties obtained by anodizing in acid electrolytes have been presented. The relationship was established between the structure of oxide films, the mechanism of their formation, as well as physicochemical characteristics. A targeted effect on the microstructure of the films made it possible to control their properties by varying the technological parameters without a radical change in the method. This made it possible to predict the behavior of nanostructures and properties for sensitive MEMS elements.