Abstract
This paper presents the capabilities of the device "Scanning multi-microscope SMM-2000" as one of the most modern methods for measuring the characteristics of materials and diagnostics of features of small-size systems. The SMM-2000 scanning multi-microscope is designed for measuring geometric and physical parameters of the surface topography of samples with nanometer spatial resolution. The principle of operation of the device is briefly described and the parameters of manual and automatic settings are presented. On the example of scanning sample No. 2 - gold on mica, graphical results are shown that show sectional analysis for the selected area of the frame, and the results of the surface roughness parameters of the selected area are also shown. Described the possibility of carrying out Fourier analysis, morphological analysis, correlation analysis, fractal analysis, etc.