Abstract
The paper proposes a method for taking into account the effect of space charge on the quality of focusing of charged particles and investigates the problem of the formation of an intense flux of charged particles using a transaxial cathode lens, which is a special case of cathode lenses with two planes of symmetry. The article solves a self-consistent problem by representing the distribution functions of potentials and space charge in the form of power series in small parameters. The author uses an improved and proven method for studying cathode lenses, based on taking into account the longitudinal component of the total aberration. The necessary equations and formulas are obtained for calculating the parameters and designing a source of charged particles based on a transaxial cathode lens.