Физико-технологические особенности процесса установки кристаллов на временный носитель в технологии внутреннего монтажа

2020

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DOI 10.21883/jtf.2020.10.49809.315-19
Data confidence 70 medium
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Abstract

The physical and technological features of the die installation on a temporary carrier in the technology of internal mounting have been studied. A reasonable choice of material from various solutions of polyamide acids (PAA) was carried out for fixing silicon dies with the active side down on a temporary carrier. The experimental dependence of the adhesion strength of silicon dies on the lifetime of PAA solutions has been established. Possible defects appeared during imidization of PAA in the process of creating highly integrated micro-assemblies, multi-chip modules and electronic modules of the system-in-case level were shown.