Abstract
In the present paper, we performed the numerical simulations and the theoretical analyses of the micro/nanoscale gas flow in the parallel gas bearings with baffle. It was found that high and low gas pressures were generated in gas bearings with baffle and as an average, high lift force was exerted on the upper surface. Our DSMC results coincided with them obtained by using molecular gas film lubrication (MGL) equation. In our analyses, the Reynolds equation using slip condition with 1st order precision overestimated the lift force and the Reynolds equation using slip condition with 2nd order precision underestimated the lift force. Even in the case when the gas was leaked through the narrow gap between the baffle and the counter surface, rather strong lift force was obtained in the DSMC simulation. This result shows the potential of this gas bearing system for MEMS/NEMS.