Influence of annealing regimes on phase transitions in nitrogen and carbon ion implanted molybdenum

Kh. R. Kazdaev, M. T. Akchulakov, E. M. Bayadilov, Vladimir I. Engelko, A. V. Lazarenko, Evgeniy S. Chebukov

1989

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DOI 10.1002/pssa.2211150118
Data confidence 70 medium
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Abstract

The possibilities are investigated of ion implantation applied alongside with subsequent thermal or electron pulse annealing in obtaining carbides and nitrides in subsurface layers of massive single crystal molybdenum samples. It is shown that carbides (Mo2C, MoC) and nitrides (Mo2N, MoN) arise during implantation mainly and the subsequent thermal annealing causes the decay (MoC, Mo2N, MoN) or the perfection of one structure only (Mo2C). As distinguished from this, an other decay of the synthesized phases, a change of their structural state (texture, polycrystal), and also the appearance of new (α-MoC1−x) phases can be observed during pulse electron annealing.