Abstract
This work are presented the calculation results of thermodynamic parameters of the reaction of magnesium fluoride decomposition by ionized water vapor with the formation of solid magnesium oxide and gaseous hydrogen fluoride at atmospheric pressure in the temperature range from room temperature to 2800◦C . The calculation of the thermodynamic parameters was carried out with the Reaction Equations software module of scientific programs HSCChemistry package. Thermodynamic analysis of magnesium fluoride MgF2 was carried out on a thermogravimetric analyzer TGA/DSC2. The thermodynamic parameters results are in good agreement with the results of thermogravimetric analysis. There were determined the optimum conditions for plasma-chemical processing of magnesium fluoride.