Abstract
In the paper, the spread of intensity of linear positioning table system vibrations is examined and an analysis of their parameters upon applying the theory of covariance functions is carried out. For the investigation, two linear positioning tables were chosen; for them, different lubricants were used: universal lubricant Loctite 8103 and lubricant Braycote 601EF for working in vacuum. The results of measurements of the vibration intensity in four fixed points upon varying the speed of the carriage were recorded on the time scale in form of arrays (matrices). The estimates of cross-covariance functions of the arrays of results of measurements of the digital vibration intensity were calculated. The estimates of auto-covariance functions of single arrays upon changing the quantization interval on the time scale were calculated too. For the calculations, the software developed upon using Matlab7 package of procedures was applied.