Abstract
The paper presents the results of studies of Zr-Fe-Cr-Ni-Ti coatings. To obtain multi-element coatings, simultaneous sputtering of cathodes of different chemical composition on an ion-plasma unit was used. The first cathode was made of Cr-Fe-Ni-Ti alloy. The second cathode was made of pure metal - zirconium (Zr).It was shown that all the studied microhardness coatings are not inferior to most common steel in industry, and the best result is achieved for Zr-Fe-Cr-Ni-Ti coatings deposited in a nitrogen atmosphere. The single-phase nature of high-entropic coatings can be determined from specular reflection spectra. The X-ray overlay of the Zr-Fe-Cr-Ni-Ti coating in a nitrogen gas atmosphere on the ZrN, FeN, CrN, NiN, TiN library cards showed that almost all the lines on the diffractogram belong to the fcc-phase solid solutions. These results suggest the formation of a high-entropy alloy.