Abstract
The stability of structures to various influences determines the effectiveness of the sensors that are based on them. A modified method of metal-stimulated electrochemical etching and hydrothermal etching made it possible to synthesize the combined structure of silicon nanowires and ZnO crystallites. The hexagonal structure of zinc oxide crystallites was determined by the X-ray diffraction method. Several causes of radiative recombination have been identified in the photoluminescence spectra, and their nature is associated with the defective structure of zinc oxide. Electron paramagnetic resonance (EPR) spectroscopy studies have revealed energy-stable, uniformly distributed and low-dimensional nanostructures.