Abstract
Three series of Al 2 O 3 coating samples are fabricated by microarc oxidation under various deposition conditions and are studied by scanning electron microscopy (SEM) in combination with energy-dispersive x-ray spectroscopy (EDXS), Rutherford backscattering, and X-ray diffraction. Defects and pores in the coatings are analyzed by positron annihilation spectroscopy at room temperature without vacuum. No nanometer pores are detected in the coatings. When changing the electrolyte-plasma oxidation conditions, one can change the concentration and the ratio of the types of vacancy defects in these Al 2 O 3 coatings.