New electrostatic energy analysers with a bounded cylindrical field

2005

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DOI 10.1088/0957-0233/16/9/012
Data confidence 70 medium
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Abstract

A new class of electrostatic energy analysers with a bounded cylindrical focusing field is presented. The focusing field used is a solution of a Laplace equation ∇2U(R, Z) = 0 with boundary conditions U(R1, Z) = U(R, 0) = U(R, L) = 0 and U(R2, Z) = V, and restricted by concentric cylindrical surfaces and two flat surfaces perpendicular to the axis of symmetry. A charged particle beam enters the field through a face window in a flat boundary electrode. Regimes of second-order focusing have been found for configurations with a point source, located on the axis of symmetry and for an extended source of large angular size. In particular, the new analysers can be used for electron spectroscopy of distant surfaces or surfaces with large roughness or even with deep dimples. These instruments in principle have no perceptible end-fields, which usually distort focusing in most of the analysers known. The design of a compact analyser for remote Auger electron spectroscopy and some experimental results, showing the capability of using these instruments for scientific and technological applications, are given.