Bulk Charging of Dielectric Films by Low Energy Electrons

1982

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DOI 10.1002/pssa.2210730209
Data confidence 70 medium
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Abstract

Accumulation of space charges in metallized dielectric films irradiated by electrons of 30 to 65 keV energy is investigated using quasistationary approximation. Time dependent profiles of space charges and associated electric fields are calculated by numerical methods. There is a satisfactory agreement between theoretical and experimental data in initial stages of the charging process.