Abstract
Sensitive elements and measuring modules are the most important components of measuring converters (sensors) of various physical quantities, so for their improvement is given special attention in the sensors development. This is because they define the basic metrological characteristics of the entire sensor. This is especially true for sensors that are designed to operate in extreme conditions: ultra-low and elevated temperatures, radiation, shocks and vibrations, aggressive environments. Such conditions are typical for nuclear energy, rocket and space and aviation equipment, petrochemical industry. Developed sensors shall provide guaranteed operability and standard technical characteristics for a long time under the influence of extreme external factors. In addition, the sensor must have a low power consumption and be compatible with modern interfaces. The listed conditions can be met by capacitive sensors of physical quantities, based on conversion of the measured parameter into a capacitance and further into another electric value. Such sensors, if the manufacturer has a proven design and technology, have a very high time and parametric stability and a long service life.