Abstract
This review provides a summary of the progress in research on various Si-based thin films as anode materials for lithium-ion batteries. The lithiation mechanism models, different types of materials from pure monolithic Si thin film to Si-based three-dimensional structured composite thin films, the effect of liquid and solid-state electrolytes on the performance of Si were considered and various available preparation techniques were discussed. A table summarizing important information on such systems including the thin film features, preparation methods and conditions, electrochemical test conditions and obtained results in order to elucidate the approaches used to prepare a stable thin film anode with high capacity and long cycle life is provided. We believe that this review will help the researchers to find some answers and induce some new ideas.