Abstract
Introduction . Heterojunction silicon solar cells represent one of the most promising directions for the development of solar photovoltaics. This is due to both their high power conversion efficiency and reasonable likelihood for further growth in performance, as well as good commercial potential of this technology, which relies on a transition from conventional diffusion-based processes to thin film deposition. Aim. The paper describes results of optimization and fabrication of heterojunction silicon solar cells using the AK-1000 inline tool, adapted for processing of 6-inch wafers. Materials and methods. In the manufacturing of solar cells, crystalline silicon wafers were subjected to wet chemical processes, and then electron, hole, and intrinsic types of conductivity of the layers based on amorphous silicon were deposited by plasma-chemical deposition. Precipitation of oxide transparent conductive layers was carried out by magnetron sputtering. To optimize the processes of obtaining solar cells, measurements of the reflection coefficient, of lifetime of minority carriers, and of current – voltage characteristics were used. Results. As a result of the work, heterojunction solar cells were obtained in a laboratory in Kazakhstan with an efficiency of 20% without using of traditional diffusion processes for solar cells manufacturing. Conclusions. The output parameters associated with light conversion efficiency demonstrate the possibility of further optimization of the parameters affecting the performance of heterojunction solar cells.