Abstract
Thin films of nickel oxide (NiO) were deposited on a 5° miscut magnesium oxide (MgO)(100) substrate using electron-beam evaporation to pursue morphology-directed resistive switching. The atomic force microscope (AFM) confirmed a stepped surface with a terrace width of ~85 nm and a step height of ~7 nm. After deposition, the film resistance decreased from 200 MΩ to 25 MΩ by annealing under ambient air at 400 °C, attributed to the increase in the p-type conductivity through nickel vacancy formation. Top electrodes of Ag (500 nm width, 180 nm gap) were patterned parallel or perpendicular to the substrate steps using UV and electron-beam lithography. Devices aligned parallel to the step showed reproducible unipolar switching with 100% yield between forming voltages 20–70 V and HRS/LRS~102 at ±5 V. In contrast, devices formed perpendicular to the steps (8/8) subsequently failed catastrophically during electroforming, with scanning electron microscopy (SEM) showing breakdown holes on the order of ~100 nm at the step crossings. The anisotropic electrodynamic response is due to step-guided electric field distribution and directional nickel vacancy migration, illustrating how substrate morphology can deterministically influence filament nucleation. These results highlighted stepped MgO as a template to engineer the anisotropic charge transport of NiO, exhibiting a reliable ReRAM as well as directional electrocatalysis for energy applications.