Interfacial modulation and optimization of the electrical properties of ZrGdO x composite films prepared using a UVO-assisted sol–gel method

2025

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DOI 10.1039/d4ra07704k
Data confidence 70 medium
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Abstract

Structural diagram of ZrGdO x gate-dielectric films based on ultraviolet ozone (UVO)-assisted treatment, and dielectric characteristics exhibited by MOS capacitors based on ZrGdO x gate-dielectric films.