Abstract
Abstract This paper presents the results of studying the formation of a carbide layer under various experimental conditions and the choice of the optimal parameters for carbidization of the tungsten surface under plasma irradiation in methane. Therefore, to assess the effect of the surface temperature of a tungsten sample during experimental work, the surface temperature of the sample was 1300-1700°C, and to assess the effect of the irradiation time, a range within 300-2400 s was selected. From the results of X-ray phase analysis of the surface of tungsten samples, concluded that the temperature of the sample surface and the duration of irradiation have a significant effect on the formation of a carbidized layer on the tungsten surface during plasma irradiation on plasma-beam installation.