Abstract
New film-forming metal-containing polymer compositions based on an alicyclic polyimide and on arylalicyclic copolyimides synthesized from tricyclodecene-, oxydiphenyl-, and benzophenonetetracarboxylic dianhydrides and oxydianiline in the presence of cobalt, nickel, iron, and copper salts in amide solvents were prepared, and their main properties were studied. Optimum synthesis conditions and compositions of metalcontaining composites with improved thermal, electrical, and other characteristics were found. The possibility of using the modified alicyclic polyimide films for fabricating integrated circuits by magnetron sputtering was examined. The samples prepared by sputtering of metals onto SPI-1 polyimide films with a chromium sublayer are characterized by high adhesion of the metal to the film surface.