Abstract
Abstract This paper presents a method of tungsten surface carbidization using a plasma-beam setup to assess the effect of temperature on the formation of tungsten carbides. Methane was used as a plasma-forming gas. The working gas pressure in the chamber was (1.3–1.4)10−1 Pa. Experiments on the formation of carbides were carried out at different temperatures (700-1000°C). It was recorded that at a temperature of 700°C, crystallization centers of a carbon film appear on the sample surface. With an increase in the irradiation temperature to 800°C and 900°C, the surface of the samples is covered with a continuous carbon film. As a result of the experimental work carried out, it was found that the formation of tungsten semicarbide occurs at 900°C. A further increase in temperature leads to the formation of tungsten monocarbide.