Abstract
This paper presents the results of modeling the features of the formation of fractal structures in thin films of tin dioxide SnO 2 obtained by the sol-gel method. The process of hydrolysis of tin tetrachloride SnCl 4 leads to the formation of tin acid Sn(OH) 4 , which has a gel-like structure. Unstable tin acid decomposes to form water and tin dioxide. The formation of cluster structures is considered depending on the "competition" of these two processes. The nonlinear evolution of sol-gel stochastic processes leads to a fractal structure of the film clusters. The peculiarities of the formation of fractal clusters and the morphology of a thin film are estimated depending on the control (technological) parameters.