Investigation of Synthesis of Carbon Nanowalls by the Chemical Vapor Deposition Method in the Plasma of a Radio Frequency Capacitive Discharge

Didar G. Batryshev, Yerassyl Yerlanuly, Tlekkabul S Ramazanov, М. Т. Габдуллин

2019

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DOI 10.1109/tps.2019.2903145
Data confidence 70 medium
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Abstract

In this paper, the synthesis of carbon nanowalls (CNWs) by the chemical vapor deposition method in the plasma of a radio frequency (RF) capacitive discharge is considered. The so-called “CNWs” are one of the allotropes of carbon, which are interesting from both the practical and theoretical points of view. Because of their large surface, CNWs are a perfect electrode material for electronic devices. CNWs were synthesized at relatively low values of RF power, and it was found that an increase in the discharge power caused a decrease in the height of CNWs and an increase in their thickness. The study of graphitization of the CNW structure showed that synthesized CNWs had a low number of defects in the structure. The obtained results could be useful for the low-cost production of CNWs by the plasma-enhanced chemical vapor deposition (PECVD) method.