Abstract
In this work, carbon and copper nanoparticles were synthesized in a radio frequency (RF)/DC discharge plasma, and the dependence of particle formation and growth on the discharge parameters was experimentally studied. Investigation of the influence of the self‐bias voltage contributed to the determination of the dependence of the dimensions of carbon and copper particles on time. Scanning electron microscopy (SEM) images and chemical composition of synthesized nanoparticles and dimension distribution graph were also obtained. The obtained results show that the diameter of nanoparticles ranged from 50 to 500 nm and depended on the plasma parameters. In addition, a direct correlation between the formation and growth of the nanoparticles and the applied DC voltage was seen. As can be seen from the experimental results, an increase in the DC voltage reduces the time needed for nanoparticle synthesis.