Abstract
A comparative analysis of the microstructure and properties of coatings has been made based on multicomponent and high-entropy transition metal nitride films, depending on the deposition conditions (temperature, bias potential, partial pressure, etc.). The structural features of the films have been analyzed. The general regularities of hard and superhard nanostructured nanocomposite coatings consisting of a columnar structure and texture growth were identified. The influence of the structural state on the change of the physical and mechanical properties of nanostructured coatings based on multicomponent and high-entropy transition metal nitride films has been found.