Electrostatic mirror objective with eliminated spherical and axial chromatic aberrations

2003

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DOI 10.1093/jmicro/52.4.365
Data confidence 70 medium
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Abstract

Computational formulae for the coefficients of the third-order spherical aberration and the second-order axial chromatic aberration are presented for an axially symmetric electrostatic electron mirror. A technique for eliminating the high-order derivatives of the potential axial distribution in mirror systems from the integrands is described. Conditions for elimination of spherical and axial chromatic aberrations, either separately or simultaneously, are found for a three-electrode axially symmetric mirror composed of coaxial cylinders of the same diameter. A principal scheme of the transmission electron microscope, where an electrostatic electron mirror serves as its objective, is presented.