Abstract
IIn this study, unstabilized zirconium dioxide (ZrO2-x) nanopowders are synthesized using vacuum arc deposition, and the effect of reaction chamber pressure on their phase composition, morphology, and dielectric properties is comprehensively investigated. X-Ray diffraction and Fourier transform IR spectroscopy reveal that a decrease in pressure increases the tetragonal ZrO2phase content from 52% to 90% and the concentration of oxygen vacancies. Impedance analysis shows that sample N30 possesses the lowest resistance (~11.5 kOhm) and the best ionic conductivity, due to the high mobility of vacancies. At the same time, sample N90 exhibits pronounced dielectric properties and interfacial polarization. It is shown that varying the synthesis conditions allows for targeted control of the electrical conductivity and polarization properties of ZrO2-x, which opens up prospects for its use as a functional material for solid oxide electrolytes, sensors, and dielectric capacitors.