Abstract
The work is dedicated to the development of an electromagnetic system for deflecting the primary electron beam in a plasma-beam installation (PBI). The system, consisting of two pairs of mutually perpendicular coils, enables two-dimensional control of the beam position, which allows for a reduction in specific thermal power, an increase in the total power of the beam-plasma discharge (BPD), and the implementation of heating and recrystallization annealing with a minimal temperature gradient. The coil parameters were calculated to generate a magnetic induction of up to 62.66 mT. The deflection of the electron beam on the surface of a metal plate was visually confirmed, demonstrating the operability and functional flexibility of the electromagnetic control system. Experiments in BPD mode using the differential collector method (aperture probe) showed an increase in ion current from 9 mA to 12 mA at an electron beam accelerating voltage of 5000 V, a deuterium pressure of 1 mTorr, and a deflection amplitude of 27.95 dB.