Abstract
Abstract This work is devoted to the investigation of the tungsten surface after exposure to Ar+, and He+. Plasma irradiation experiments were conducted in a plasma-beam installation. The analysis of the modification of the tungsten surface was carried out by scanning electron microscopy and contact profilometry. As a result of the studies conducted, it was found that on the tungsten surface after irradiation argon plasma shows «relief of etching». It is assumed that the formation of the relief occurs mainly due to the dispersion of the surface by high ion energy on the cascade mechanism. After exposure to He, areas with a wavy structure were observed on the surface. The formation of such relief occurs as a result of structural defects caused by ion-induced stresses in the near surface area.