Abstract
The paper presents the development of a triple probe consisting of three tungsten electrodes with a diameter of 1 mm, intended for applications on a plasma beam installation (PBI). The appropriate measuring equipment and electrical wiring diagram have been selected. The probe has successfully passed the commissioning tests, during which key factors were identified that are important for accurate interpretation of the results and integration into the diagnostic system of the PBI. Experimental measurements of plasma parameters using a triple probe showed comparable results with a single probe: the electron temperature was 7 eV, and the plasma concentration was – 10¹⁶ m⁻³. The experimental results obtained confirm the correct operation of the developed probe and its use in experiments due to the simplicity of data processing compared with other types of probes.