Abstract
The computer simulation of the depth distributions of implanted titanium and nitrogen ions with e energies was performed= 70, 150, 250, 550, 700 and 1000 eV, energy loss in titanium. It is found that these curves (for different energies), both for titanium and nitrogen, have distinct maxima, and their concentrations are unevenly distributed in depth. As shown by the calculations, the distribution of energy losses for ionization and excitation by the depth of titanium and nitrogen material in titanium are sharply decreasing functions for all calculated energies. With increasing energy, the maximum value in the distribution of implanted ions decreases, and energy losses – increases.