Аннотация
Abstract Determining the features of the formation of hierarchical structures based on the interactions of elementary particles is a promising area of research. The deposition of 20 and 25 layers of zinc oxide by spray pyrolysis on the Si surface with stepped porosity led to the formation of ZnO particles of various sizes. X-ray fluorescence spectroscopy revealed zinc-containing compounds in thin formed layers. The maximum photoluminescence intensity and peaks characteristic of nanosized zinc oxide were found for a sample with 25 film layers. The mechanism of nanocrystal formation includes the capture of charges on oxygen vacancies.